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Derniers dépôts
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Thibaut Meyer, Aurélie Girard, Christophe Cardinaud, Marek Bouška, Emeline Baudet, et al.. Investigation of plasma species, etch products and surface modification during etching of Ge, Sb and Se-based materials in CH 4 -H 2 -Ar plasmas. 25th International Symposium on Plasma Chemistry (ISPC25), May 2023, Kyoto, Japan. ⟨hal-04675793⟩
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T Meyer, A Girard, M Bouska, E Baudet, M Baillieul, et al.. Investigation of plasma species, etch products and surface modification during etching of Ge, Sb and Se-based materials in CH4-H2-Ar plasmas. 25th International Symposium on Plasma Chemistry (ISPC25), Takayuki Watanabe - Kyushu University; Satoshi Hamaguchi - Osaka University, May 2023, Kyoto, Japan. ⟨hal-04675788⟩
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S Chouteau, A Durocher-Jean, A Granier, M Richard-Plouet, L Stafford. Time-resolved analysis of Ar metastable and electron populations in low-pressure misty plasma processes using optical emission spectroscopy. Plasma Sources Science and Technology, 2024, 33 (7), pp.075016. ⟨10.1088/1361-6595/ad5d11⟩. ⟨hal-04672943⟩
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Simon Chouteau, L. Stafford, Agnès Granier, Antoine Goullet, Mireille Richard-Plouet. Handling Nanoparticle Content in Nanocomposite Thin Films Deposited by Misty Plasma Processes through Controlled Flash Boiling Atomization. Langmuir, 2024, 40 (6), pp.3015-3023. ⟨10.1021/acs.langmuir.3c03176⟩. ⟨hal-04549282⟩
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Issraa Shahine, Quentin Hatte, Maxime Harnois, Pierre-Yves Tessier. Large Area Freestanding Au Nanoporous Ultrathin Films Transfer Printed on Bendable Substrates and 3D Surfaces for Flexible Electronics. ACS Applied Electronic Materials, 2024, 6 (4), pp.2281-2288. ⟨10.1021/acsaelm.3c01771⟩. ⟨hal-04552765⟩
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Pascal Bargiela, Vincent Fernandez, Christophe Cardinaud, John Walton, Mark Greiner, et al.. Towards a reliable assessment of charging effects during surface analysis: Accurate spectral shapes of ZrO2 and Pd/ZrO2 via X-ray Photoelectron Spectroscopy. Applied Surface Science, 2021, 566, pp.150728. ⟨10.1016/j.apsusc.2021.150728⟩. ⟨hal-03355769⟩
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Allan Lebreton, Marie-Paule Besland, Pierre-Yves Jouan, Tatiana Signe, Cédric Mannequin, et al.. Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors. Journal of Vacuum Science & Technology A, 2024, 42 (2), pp.023405. ⟨10.1116/5.0177028⟩. ⟨hal-04423908⟩
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Michael Rodriguez-Fano, Mohamad Haydoura, Julien Tranchant, Etienne Janod, Benoît Corraze, et al.. Enhancing the Resistive Memory Window through Band Gap Tuning in Solid Solution (Cr1–xVx)2O3. ACS Applied Materials & Interfaces, 2023, 15 (47), pp.54611-54621. ⟨10.1021/acsami.3c09387⟩. ⟨hal-04361024⟩
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J. Zgheib, L. Berthelot, J. Tranchant, N. Ginot, M.-P. Besland, et al.. Electron-enhanced high power impulse magnetron sputtering with a multilevel high power supply: Application to Ar/Cr plasma discharge. Journal of Vacuum Science & Technology A, 2023, 41 (6), pp.063003. ⟨10.1116/6.0002857⟩. ⟨hal-04299303⟩
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Nombre de documents
Nombre de notices
295
Mots-clés
Oxides
Biofilms microbiens
XPS
Functionalization
Avalanche breakdown
Mott insulators
Argon InP chlorine etching inductive coupled plasma ICP modeling plasma sheath simulation
Ablation laser
Plasma etching
Mass spectrometry
A Multilayers
Biomembranes
Chalcogenide
Optical interferometry
Sputtering
Residual stress
Nanocomposite
Applications industrielles
A-CNx
Bixbyite
X-ray diffraction
Resistive switching
CHLORINE PLASMAS
Atomic layer etching
CaTiO3Pr^3^+
Buffer Couple
NEXAFS
Rutile
Band alignment
A1 Characterization
Semiconductors
Titanium dioxide
Colloidal solution
Transmission electron microscopy
CNTs’ collapse
X-ray photoelectron spectroscopy
B2 Quaternary
Plasmas froids
Thin films
CH4
Band gap
TEM
B Chemical synthesis
Aryl-diazonium salts
Amyloid precursor
Transfert d'énergie
Structure
Integrated optics
Adsorption
B2 Semiconducting indium compounds
AuCu alloy
Carbon Nanotube
Physical vapor deposition
Aluminium nitride
Scanning electron microscopy
Biomasse
Selenization
Nanotubes
Alzheimer's disease
Films
Amorphous
Thin film
3 nm in size
Alloying
AlN
Low-pressure plasma processing
Non-volatile memory
Calcined clay
TiO2
Atomic force microscopy
Sol-gel
Anatase
Carbon
Mott insulator
Bipolar resistive switching BRS
Spectroscopic ellipsometry
V2O3
Optical waveguides
AZO thin films
Vanadium Sesquioxide
C Photoelectron spectroscopy
Kirkendall effect
Ambipolar material
SF 6
B1 Inorganic compounds
Annealing
Copper
BOMBARDMENT
B2 Semiconducting alloys
A3 Physical vapor deposition processes
Capacitance
A Chalcogenides
Biocapteurs
A Thin films
B3 Solar cells
Optical properties
CIGSe
Magnetron sputtering
PECVD
Etching