Architectured columns with a metal-dielectric periodic nanostructure
Résumé
We engineer a sputter deposited metal/oxide periodic structure based on W and Ta,and corresponding
oxides with tuneable alternations from a few nanometers to a few tens nanometers,combined with the
preparation of inclined, zigzag and spiral columns. This work shows how bi-component periodic mul-
tilayers can be produced within some inclined nano-columns exhibiting oriented, zigzag and helix
structures. This unique combination of controlled columnar structure and periodic multilayers enables
new opportunities to create some unusual structural designs for functional materials.