Real-Time ellipsometric spectra without systematics errors
Résumé
In real-time measurement, it is difficult to reduce systematic errors on spectra of ellipsometric angles Ψ and Δ by the mean of two measurements
at two analyzer positions with the incidence plane +45° and -45° [1-2]. Generally, the analyzer is mounted on a motorized rotation stage. The
rotation of the optical component from -45° to +45° requires few seconds, and this is incompatible with dynamic measurements.
Domaines
Physique [physics]| Origine | Fichiers produits par l'(les) auteur(s) |
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