Nanostructuring of SnO2 Thin Films by Associating Glancing Angle Deposition and Sputtering Pressure for Gas Sensing Applications
Résumé
SnO2 thin films were prepared by conventional and
Glancing Angle Deposition reactive sputtering, and their gas
sensing properties were investigated. The porosity of the
as-prepared films was widely assessed using optical methods, and
the sensing performances of these active layers were correlated
with the evolution of surface and film porosity as a function of
deposition conditions and annealing treatment. The sensor made of
inclined columns grown at high sputtering pressure (6
10
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Soumis le : lundi 12 décembre 2022-09:28:53
Dernière modification le : samedi 16 décembre 2023-12:33:36
Archivage à long terme le : lundi 13 mars 2023-18:46:15
Citer
Achraf El Mohajir, Mohammad Arab Pour Yazdi, Anna Krystianiak, Olivier Heintz, Nicolas Martin, et al.. Nanostructuring of SnO2 Thin Films by Associating Glancing Angle Deposition and Sputtering Pressure for Gas Sensing Applications. Chemosensors, 2022, 2022 (10), pp.426 (15). ⟨10.3390/chemosensors10100426⟩. ⟨hal-03894057⟩
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